JPH0136978B2 - - Google Patents

Info

Publication number
JPH0136978B2
JPH0136978B2 JP58190210A JP19021083A JPH0136978B2 JP H0136978 B2 JPH0136978 B2 JP H0136978B2 JP 58190210 A JP58190210 A JP 58190210A JP 19021083 A JP19021083 A JP 19021083A JP H0136978 B2 JPH0136978 B2 JP H0136978B2
Authority
JP
Japan
Prior art keywords
wafer
block
mounting device
mounting
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58190210A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6081820A (ja
Inventor
Juji Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP19021083A priority Critical patent/JPS6081820A/ja
Publication of JPS6081820A publication Critical patent/JPS6081820A/ja
Publication of JPH0136978B2 publication Critical patent/JPH0136978B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP19021083A 1983-10-11 1983-10-11 分子線エピタキシヤル装置のウエハ取付装置 Granted JPS6081820A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19021083A JPS6081820A (ja) 1983-10-11 1983-10-11 分子線エピタキシヤル装置のウエハ取付装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19021083A JPS6081820A (ja) 1983-10-11 1983-10-11 分子線エピタキシヤル装置のウエハ取付装置

Publications (2)

Publication Number Publication Date
JPS6081820A JPS6081820A (ja) 1985-05-09
JPH0136978B2 true JPH0136978B2 (en]) 1989-08-03

Family

ID=16254294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19021083A Granted JPS6081820A (ja) 1983-10-11 1983-10-11 分子線エピタキシヤル装置のウエハ取付装置

Country Status (1)

Country Link
JP (1) JPS6081820A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07161801A (ja) * 1993-12-02 1995-06-23 Nippon Telegr & Teleph Corp <Ntt> 基板ホルダ
DE4420113A1 (de) * 1994-06-09 1995-12-14 Leybold Ag Transportvorrichtung für in einer Vakuum-Beschichtungsanlage zu beschichtende Substrate

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5730320A (en) * 1980-07-29 1982-02-18 Fujitsu Ltd Substrate holder for molecular beam epitaxy
JPS5759665A (en) * 1980-09-25 1982-04-10 Furukawa Electric Co Ltd:The Control method for coated article-baking oven
JPS57107026A (en) * 1980-12-25 1982-07-03 Seiko Epson Corp Heating mechanic for vacuum machine
JPS58102526A (ja) * 1981-12-14 1983-06-18 Nec Corp スパツタ用パレツト治具
JPS58106820A (ja) * 1981-12-19 1983-06-25 Toshiba Corp 膜形成装置

Also Published As

Publication number Publication date
JPS6081820A (ja) 1985-05-09

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